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MEMSnet Home: MEMS-Talk: adhesives
adhesives
2001-12-21
kaustubh bhate
2001-12-24
Michael Yakimov
2001-12-26
Henry Yang
2002-01-14
Brubaker Chad
adhesives
kaustubh bhate
2001-12-21
Hi Everybody,
I am trying to bond some pre-thinned wafers (200um
thick) with LPCVD nitride on it (1000A) - to a normal
wafer substrate(500um ) thick.I need a temporary
bonding adhesive which I should be able to remove
after I have done some etching/lithography steps on
the pre-thinned wafers.

Does anybody know of commercially available adhesives
that I can use for this? I need an adhesive which is
very  simple in it's application and ideally would
like something which I can just apply in-between the
two wafers and then stick them together and later
should be able to de-bond them easily too.

Kaustubh Bhate.

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