MEMS-talk

News	MEMSnet Home: MEMS-Talk: Thick positiv resist Suppliers for Diamond Drill Bits? 2001-12-19 Jordan M. Berg Hard mask for 20 um deep SiO2 RIE etch? 2001-12-19 Jon Doe 2001-12-19 X. Yuan 2001-12-21 Jon Doe Thick positiv resist 2001-12-21 Jon Doe LTO in a Novellus reactor? 2001-12-19 Jon Doe 2001-12-19 Vic Kley 2001-12-19 Jim Intrater -- IE Thick positiv resist Jon Doe 2001-12-21 Hi all: Does anybody out there have experience with a thick positive resist, which holds up to 20 um deep RIE oxide etches? Thanks for sharing your experience with us. Happy Holidays. Thomas __________________________________________________________________ Gesendet von Yahoo! Mail - http://mail.yahoo.de Ihre E-Mail noch individueller? - http://domains.yahoo.de reply
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