Ziggy,

Do you know what your surface roughness is ?

Maurice H. Norcott
Senior Technician
Silicon Genesis Corporation
590 Division Street
Campbell, CA 95008

408-871-3948 Office
408-977-6333 Pager
[email protected]



-----Original Message-----
From: Zigurts Majumdar [mailto:[email protected]]
Sent: Wednesday, December 26, 2001 6:11 PM
To: [email protected]
Subject: [mems-talk] glass-glass bonding


HI, Does anyone have a detailed protocol for bonding glass to glass? We
have been trying to bond while maintaining an optical quality surface
(pure thermal bonding doesn't seem to work) and we haven't had luck with
applying a voltage across the glass with temp around 400 degrees. We're
using pyrex right now (borofloat, specifically). Any suggestion would be
appreciated.

Thanks,

Ziggy
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