I think you can try to pre-coat PTFE before spincoating a photoresist and
remove the coating afterwords. This would retain the original low surface
energy of PTFE

Nickolay

Yiyi Zhang wrote:

> Hi all,
> Does anyone know how to significantly decrease surface
> tension of photoresists, positive or negative, so as
> to spin-coat onto wafers with very low critical
> surface tension, such as PTFE? No surface
> pre-treatment is allowed because we want to keep the
> original low surface energy. Any suggestion is
> appreciated.
>
> Thanks in advance.
>
> Yiyi Zhang
> Department of Microgravity
> Institute of Mechanics, Chinese Academy of Sciences
> Beijing 100080
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