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MEMSnet Home: MEMS-Talk: surface tension
surface tension
2001-12-29
Yiyi Zhang
2001-12-31
Nickolay V. Lavrik
2001-12-31
Alex Shenderov
2002-01-02
alexander li
2002-01-04
Yiyi Zhang
2002-01-14
Mighty Platypus
surface tension
Alex Shenderov
2001-12-31
You'll have adhesion problem with PTFE anyways.  Have you tried laminating
dry sheet photoresists? Unless you are trying to do very fine structures,
that might work.

What are you trying to make?  I.e., are you trying to pattern PTFE, or do a
liftoff from a PTFE substrate? You may reply directly to:
[email protected]

Good luck.

Alex

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Yiyi Zhang
Sent: Saturday, December 29, 2001 1:59 AM
To: [email protected]
Subject: [mems-talk] surface tension


Hi all,
Does anyone know how to significantly decrease surface
tension of photoresists, positive or negative, so as
to spin-coat onto wafers with very low critical
surface tension, such as PTFE? No surface
pre-treatment is allowed because we want to keep the
original low surface energy. Any suggestion is
appreciated.

Thanks in advance.

Yiyi Zhang
Department of Microgravity
Institute of Mechanics, Chinese Academy of Sciences
Beijing 100080
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