Hi, Guys,

Dose any one has experience in bonding single crystalline SiO2(quartz crystal)
onto silicon?  How to overcome the difficulty that their thermal expansion
factors
differ significantly? What is the process? Or, Which papers give detailed
description of the bonding?

Any reply will be greatly appreciated!

Wang, Zheyao
------------------------------------------
Institute of Microelectronics
Tsinghua University
Beijing, 100084 China
Office: Room 3-309
Phone: +86-10-62789147/51 ext. 309
E-mail: [email protected]
        [email protected]