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MEMSnet Home: MEMS-Talk: Silicon etching
Silicon etching
2002-01-03
George Diercks
Silicon etching
George Diercks
2002-01-03
We are experiencing intermittent staining on silicon surfaces.  Material is
<100> boron doped silicon.  Surfaces are clean until they are etched in acid
of which the main component is either nitric or acetic.

I'm looking for an explanation of the stains and the reason(s) for the
sporadic exhibition of stains.

George Diercks
Manufacturing Engineer

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