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MEMSnet Home: MEMS-Talk: Miniature vacuum pressure transducer
Miniature vacuum pressure transducer
2002-01-03
Rick Y Chang
2002-01-04
Raj Gupta
Miniature vacuum pressure transducer
Raj Gupta
2002-01-04
Hi Rick,

If you are interested in licensing a technology from MIT, this idea
might suit your needs for a pressure sensor.  Let me know.

http://www.delphion.com/details?pn=US05955659__

Raj


Rick Y Chang wrote:

> Hello everybody,
>
> We are looking for vacuum pressure sensors in die form that can be
> wire-bonded in a small vacuum package to monitor the absolute pressure. The
> pressure range is from 1e-4 torr to atmosphere. Does anyone have any idea
> where we can get one? We wouldn't mind even if they are only prototypes.
>
> Thanks,
>
> Rick Chang
> Raytheon Infrared Operations
> (805) 562-2607
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