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MEMSnet Home: MEMS-Talk: etch Cr in HCl/H2O
etch Cr in HCl/H2O
2002-01-05
Onnop Srivannavit
2002-01-11
Ravi Shankar
etch Cr in HCl/H2O
Onnop Srivannavit
2002-01-05
Hi All

I found from web that HCl:H2O can etch Cr (shown
below). However, they need to touch substrate with
aluminum wire. I wonder if anyone know why we need to
use aluminum wire to touch substrate. Is there any
books or article talking about this phenomena? Thanks
in advance.

 Chromium Etchant

     *    HCl:H2O2  (3:1)  This will also etch gold
film.

     *    HCl:H2O  (1:1)  Heat to 50C, immerse
substrate
          and touch with aluminum wire.

     Chromium/Nichrome Etchant

     *    HCl:H2O2  (3:1)  This will also etch gold
film.

     *    HCl and touch with aluminum wire.
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