Hi MEMS researchers,
Does anybody know research groups or vendors (in US if possible) who could
provide thin film pzt bimorph membrane that generate 10 microns (or +/- 5
microns) deflection within 500 um x 500 um pixel. The block force needed
would be around 0.01~0.1 N.
Thank you.
Sincerely,
EH
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Eui-Hyeok (EH) Yang, Ph.D
MEMS Technology Group, M/S 302-306
In Situ Technology and Experiments Systems Section (384)
NASA Jet Propulsion Laboratory
California Institute of Technology
4800 Oak Grove Drive, Pasadena, CA 91109-8099
Tel: 818-354-7059 Fax: 818-393-4540
Email: [email protected]
Personal URL: http://members.fortunecity.com/jaehyun2
