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MEMSnet Home: MEMS-Talk: Non-Chromium Trioxide Defect Etch
Non-Chromium Trioxide Defect Etch
2002-01-10
Art Glidden
2002-01-21
Greg Mattiussi
2002-01-21
Art Glidden
Non-Chromium Trioxide Defect Etch
Art Glidden
2002-01-10
Looking for a non-CrO3 etch for finding dislocation, slip, and stacking
fault defects in 100 Si slices. I've read a 1990 paper on an etch employing
Copper Nitrate, developed at MEMC. Experience using that, or other, more
user-friendly etchant for this purpose?

A.G.

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