A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: nitride to Si bonding?
nitride to Si bonding?
2002-01-09
Nickolay V. Lavrik
2002-01-10
Kenneth Smith
2002-01-10
Heiko van der Linden
2002-01-10
Roger Shile
2002-01-11
Niels Olij
nitride to Si bonding?
Heiko van der Linden
2002-01-10
Hi Nickolay,

Anodic Bonding will work if you first oxide the nitride wafer. Voltage
should be higher than 750V and temperature close to 400 degrees

Greets,
Heiko van der Linden

*******************************
MESA+ Research Institute
      Twente University
         P.O. Box 217
     7500 AE Enschede
       The Netherlands
*******************************


-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Nickolay V. Lavrik
Sent: Wednesday, January 09, 2002 9:08 PM
To: [email protected]
Subject: [mems-talk] nitride to Si bonding?


I know that standard bonding processes are
available for materials such as Si, oxide and
pyrex.

Does any one if similar procedures exist for
reliable (without organic adhesives) permanent
bonding of Si and nitride coated wafers.


Any relevant information will be highly
appreciated

Nickolay
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.mems-exchange.org/

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
The Branford Group
MEMStaff Inc.
Process Variations in Microsystems Manufacturing