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MEMSnet Home: MEMS-Talk: quartz-silicon bonding
quartz-silicon bonding
2002-01-12
Wangzy-IMETU
quartz-silicon bonding
Wangzy-IMETU
2002-01-12
Hi, everybody,

Dose any one has the experience in bonding quartz crystal
with silicon? I encountered difficulties when tried this.

Any suggestion will be greatly appreciated!

Wang, Zheyao
-----------------------------------------
Institute of Microelectronics
Tsinghua University
Beijing, 100084 China
Office: New Microelectronic Building
        Room 3-309
Phone: +86-10-62789147/51 ext. 309
Fax:   +86-10-62771130
Email: [email protected]

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