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MEMSnet Home: MEMS-Talk: a 45-degree inclined surface
a 45-degree inclined surface
2002-01-14
ahmed osman
2002-01-14
David Nemeth
2002-01-16
Ravi Shankar
2002-01-15
Okulan, Nihat
a 45-degree inclined surface
ahmed osman
2002-01-14
Hi all,

Is there a micromachining technique that can achieve a surface 45
degree-inclined with respect to the wafer surface? I'm not restricted to a
specific material nor to a specific technology,but the 45-degrees should be
achieved with high accuracy and thus i first considered wet etching in
silicon but i failed to get the required angle by any of the known tricks.

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