I suggest that you speak to Lev Dulman who runs Dulman Labs in either San
Carlos or San Bruno, California. Area code 415, he is in the book. I dont know
the number.

He gave an excellent talk on this subject at a meeting in January and could be
of great help to you.

Peter Will

>
>Dear Colleagues,
>
>I am looking to buy an interferometer which can help me in doing modal
>analysis of mems devices. I am hoping to be able to measure mechanical motion
>with frequencies up to 50 kHz. The width of the vibrating mems device could be
>as small as 10 microns. I am talking to UBM, but, would like to explore other
>options. If you are familiar with any other company that makes such a
>measurement tool, please share your knowledge with me.
>
>I appreciate very much your time and help.
>
>Thanks,
>
>Vijay Dhuler
>
>
>