Hello Riche,

I am very interested in developing a set of
substrate standards for bulk micromachined
MEMs.  In particular, standards for thickness
of substrates and etched membranes in substrates.
TTV and absolute thickness are of interest.

Stephen Jones
University of Virginia
EE dept.
Consultant to Virginia Semiconductor Inc.
(540) 373-2900



>>
>> Is there any interest or need for standards development for mems
>> devices or components?  I'm looking at short to mid range time frames.
>>
>> Thanks,
>>
>> Rich Vandame
>> Aerospace Staff Engineer
>> SAE Technical Standards Division
>>
>>
>>
>>