Hi there

You could try Oxford Instruments Plasma Technology.  We (yes, I work for them)
make RIE and ICP etchers that could do the job.  Take a look at the web site at
http://www.oxford-instruments.com or email me at [email protected].
Alternatively, if you are going to MEMS2002 in Las Vegas, come and say 'hi' at
the Oxford Instruments stand.

Regards,

Martin Walker
>
> From: Hanqing Li 
> Date: Tue, 15 Jan 2002 11:09:32 -0500
> To: [email protected]
> Subject: [mems-talk] need shallow etcher info
>
> Dear all:
>
> Our group is looking to buying a shallow etcher that can annisotropically
> and uniformly etch Si with photoresist mask.  The depth range is 1 um to 30
> um.  Any vendor information and user experience are greatly appreciated.
>
> Hanqing Li
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