Need the data of optical properties of polysilicon and
Au-coated surface
Zhang Xuming
2002-01-19
We are intended to use Cronos's MUMPs process to fabricate some testing
structures of optical components. Some data of optical properties are needed,
including
(1) refractive index n and extinction coefficient k of polysilicon layers;
(2) reflectivity and RMS roughness (sigma) of the Au-coated layer.
Pls do email me at [email protected] if you have these data. Thanks.
