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MEMSnet Home: MEMS-Talk: SiO2 Deposition
SiO2 Deposition
2002-01-19
TEL Klaus Beschorner
2002-01-19
Philip Lau
SiO2 Deposition
TEL Klaus Beschorner
2002-01-19
 >I am trying to deposit about 50 Microns of Sio2 on Si and want a very
 > flat surface profile. Can some one suggest an appropriate method for >it?

Sounds like a case for flame hydrolysis deposition.
Google will give you many suppliers.

best regards,
klaus


                        (TEEL)          Tokyo Electron Europe Limited
                                        PVD Process Support  (ex MRC)
Klaus Beschorner                                   Tel +49-7033-45683
Drosselweg 6                                       Fax +49-7033-45631
71120 Grafenau, Germany                       Mobile +49-174 315 7754

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