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MEMSnet Home: MEMS-Talk: Allignment marks for proper orientaion of KOH mask
Allignment marks for proper orientaion of KOH mask
2002-01-21
Brian Semak
Allignment marks for proper orientaion of KOH mask
Brian Semak
2002-01-21
Hello everyone

Can anyone help me with some allignment marks. I am looking for allignment
marks, which ensures proper orientation of a KOH mask in the 100 plane of a
wafer. The masks I am looking for, should be etched into the wafer, thus be
used for alignment of the mask for subsequent KOH etching. If anyone here as
some ideas and suggestions, I would be very gratefull.

Med venlig hilsen/Kind regards

Brian S. Semak, M.Sc.
R&D Silicon Processing

Hymite Aps
DTU, Bygn. 325, 1st floor
2800 Lyngby

Telephone(Direct): + 45 4525 9147
Fax:                     + 45 4525 9156
E-mail: [email protected]
www.hymite.com

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