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MEMSnet Home: MEMS-Talk: Metal sticking well to silicon and silicon nitride
Metal sticking well to silicon and silicon nitride
1996-07-03
Xuecheng Jin
Metal sticking well to silicon and silicon nitride
Xuecheng Jin
1996-07-03
May I know what kind of good conducting metal stuck well to silicon wafer
and silicon nitride thin film? How about gold? Do we need to put interface
layer such as cromium etc. to get better adhesion? Thanks a lot.

Best Regards.                                            Sincerely Yours,
                                                         XueCheng JIN
============================================================================
                                XueCheng JIN
                               --------------
Phone:   (415) 497-0724 (home)                   Address: 8G Barnes
Web:     http://www-leland.stanford.edu/~xcjin            Escondido Village
Email:   [email protected]                        Stanford, CA 94305
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