sz,
I was told about a procedure called Reverse-electroplating that
takes advantage of the properties that high points erode faster
to smooth out a metal coating. However, I have not personally
tried that procedure so I cannot say to what extent it
performs. You can research in that direction to see if you can
use it.
Good luck,
Patrick Cheung, research scientist PARC, MS 35-1674
(O) 650-812-4338 (FAX) 650-812-4334 3333 Coyote Hill Road
[email protected] Palo Alto, CA 94304
"pcheung can mems, and so can you!"
>> >>
On Sat, 19 Jan 2002, [iso-8859-1] sou zou wrote:
> From: "[iso-8859-1] sou zou"
> To: "mailing list (MEMS talk)"
> Date: Sat, 19 Jan 2002 05:00:33 PST
> Subject: [mems-talk] very uniform surface of elctroplated Nickel ?
>
> Hi folks !
>
> I am looking for some advices to get a very uniform surface
> of nickel electroplated layers (especially on silicon).
> Through my bibliography research, it seems that the trick is
> mainly to get an uniform current density across the coated
> surface (parallel current lines). The problem is the resist
> pattern wich does'nt allow to obtain that kind of strictly
> vertical current lines. Does anyone has an ingenious idea or
> a good web address to help me overcoming such a problem,
> please ?
>
> Thank you in advance,
>
> sz
>
>
>
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