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MEMSnet Home: MEMS-Talk: about CMP equipments
about CMP equipments
2002-01-23
zhuxiaorui
about CMP equipments
zhuxiaorui
2002-01-23
Dear all my friends:

I want to know what is the precision of the CMP (chemical polish) equipments.

I would appreciate if someone response me.

Thanks,
Zhu Xiaorui
            zhuxiaorui
            [email protected]

reply
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