It probably is roughness which can be checked by AFM, Many
Silicon etches have a buffer such as Acetic in them to slow
the etch rate a bit and minmize haze.

-----Original Message-----
From: [email protected] [mailto:[email protected]]
Sent: Wednesday, January 23, 2002 5:15 AM
To: [email protected]
Subject: [mems-talk] Haze on HF:Nitric etched silicon


I am interested in cause of sporadic cloudiness which could be 'haze' on
silicon surfaces etched using dilute HF:Nitric, any insight or useful
references would be gratefully received.

Thanks in advance,

Sarah Sharp
Senior Technologist
Oxford Instruments Analytical



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