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MEMSnet Home: MEMS-Talk: Re: liftoff advice
Re: liftoff advice
1996-07-03
[email protected]
Re: liftoff advice
[email protected]
1996-07-03
Positive photoresists are usually very soluble in acetone, which has been
used in the past for lift-off processes.
Try heating chlorobenzene to speed up dissolution of PR.  The swelling PR
should cause lifting.


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