MEMS-talk

News	MEMSnet Home: MEMS-Talk: wet etchant of Silicon with etch rate in few nm/min wet etchant of Silicon with etch rate in few nm/min 2002-01-23 Mohammed Javeed Shaikh wet etchant of Silicon with etch rate in few nm/min 2002-01-24 Bernard Legrand Need to remove a couple of thin layers from a GaAs wafer 2002-01-29 Xinbing Liu wet etchant of Silicon with etch rate in few nm/min Bernard Legrand 2002-01-24 Hi, I have tried KOH 1 mol/l at 23 0C on (100) Si. Etch rate is about 20 nm / min if there is no oxide on the silicon surface. Regards Bernard reply
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