Emer et al

These sidewall profiling tips are still made, although they are useless
without the special AFM head. The IBM company was sold to Veeco and many of
the origianl IBM machines are still in operation (including one at our
company) so you may be able to obtain a service solution. Veeco is rumored
to be coming out with their own version of this invention.

Vic Kley


----- Original Message -----
From: Randall Cha (Dr) 
To: 
Sent: Thursday, January 24, 2002 4:35 AM
Subject: RE: [mems-talk] measurement of sidewall roughness


> Dear Emer,
>
> Sometime back, IBM developed a kind of AFM tip that looks like
hammer-head,
> which can be used to measure sidewall roughness quantitatively. If my
memory
> do not fail me, it supposes to read measurements in 2-axis. However, now I
do
> not know whether they make that kind of tips anymore, and whether any
company
> is making some eqt that house the tip.
>
> You may like to check out Veeco.
>
> By the way, how deep are you going to check the sidewall profile? If it's
> deeper than 6um, then you might have a problem.....
>
> Randall
>
> -----Original Message-----
> From: Emer O'Reilly [mailto:[email protected]]
> Sent: Wednesday, January 23, 2002 4:01 AM
> To: [email protected]
> Subject: [mems-talk] measurement of sidewall roughness
>
>
> Dear all,
>
> I hope someone can help me with my query. If I get enough responses, I
will
> collate answers and sent to the message board.
> I am interested in carrying out sidewall roughness measurements on my
> samples, using AFM. My samples are polymer tracks of various thickness on
> silicon and are as yet uncleaved. Has anyone carried out this type of
work?
> If so I would be grateful to learn about the do's and don'ts.
>
> Thanks in advance.
>
> Emer.
>
>
>
****************************************************************************
> ***
> Research Engineer, Nanotechnology Group,
> NMRC, University College Cork, Ireland.
>
> Direct line: +353 (0)21 4904182
> Fax: +353 (0)21 4270271
> www.nmrc.ie
>
****************************************************************************
> ***
>
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a
> name of winmail.dat]
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