Dear Emer

You might want to have a look at this:
http://www.fujita3.iis.u-tokyo.ac.jp/~limms/rapportpdf/DOC14%20-%20JBP%20-%2
0PROFILER%202001.pdf
I am not aware of any major publication about this work since I last saw the
people behind it.
You might want to contact them directly.
Names and E-mail addresses somewhere in
http://www.fujita3.iis.u-tokyo.ac.jp/~limms/
Hope this helps a bit.

Fabrice

====================================================

Fabrice Morin
Japan Advanced Intitute of Science and Technology
School of Chemical Materials Science
Tamiya Laboratory
T 923 1292
Ishikawa Ken, Nomi Gun, Tatsunokuchi Machi, Asahidai 1-1
JAPAN

Tel: 0761 51 1663

====================================================


> -----Original Message-----
> From: Emer O'Reilly [mailto:[email protected]]
> Sent: Wednesday, January 23, 2002 4:01 AM
> To: [email protected]
> Subject: [mems-talk] measurement of sidewall roughness
>
>
> Dear all,
>
> I hope someone can help me with my query. If I get enough responses, I
will
> collate answers and sent to the message board.
> I am interested in carrying out sidewall roughness measurements on my
> samples, using AFM. My samples are polymer tracks of various thickness on
> silicon and are as yet uncleaved. Has anyone carried out this type of
work?
> If so I would be grateful to learn about the do's and don'ts.