hi...
        Here are some references which I thought may help u
1.Edward K.Chan and Robert W.Dutton, Electrostatic Micromechanical Actuator
with Extended Range of Travel, Journal of Microelectromechanical Systems,
Vol. 9, No.3 September2000, pp.321-328.
2.Edward K.chan, Krishna Garikipati, and Robert W.Dutton, Characterization
of Contact Electromechanics Through Capacitance-Voltage Measurements and
Simulations, Journal of Microelectromechanical Systems, Vol. 8, No.2 June
2000, pp.208-217.
bye



-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Paolo Bondavalli
Sent: Friday, January 25, 2002 9:15 AM
To: [email protected]
Subject: Re: [mems-talk] electrostatic pull-in voltage for cantilever
beam


Hi,
These are some refs for you,
I hope this can help you,
(+ Performance of Low-Loss RF MEMS Capacitive Switches ;, IEEE Microwave and
guided wave letters, Vol. 8, N.8, 1998).
(+ RF Switches for Reconfigurable Integrated Circuits;, IEEE Transactions on
microwave theory and techniques, Vol. 46, N.11, 1998).
(+ Design of Low Actuation Voltage RF MEMS Switch ;, IEEE  MTT, 2000).
(+ Mechanical design and optimization of capacitive micromachined switch ;,
Sensors and Actuators A, 93, pp273-285, 2001).
Bye,


LEOW Cheah Wei a icrit :

> Dear everybody,
>
>        can somebody post or point to some link on measured data for
pull-in
> voltage of a
> 1) cantilever beam
> 2) bilayer cantilver beam (e.g. poly2 with metal from MUMPS and it is
curved
> )
> 3) related structure
>      i'm interested in simulating/modeling the pull in voltage Vs beam
> length. The data will be very useful in verifying the result.
>
> thank you
>
> LEOW Cheah Wei
> master student
> Universiti Teknologi Malaysia
> http://www.geocities.com/cheah_wei
>
> [demime 0.98e removed an attachment of type image/gif]
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--
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Dr. Paolo Bondavalli
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LABCOM - Laboratoire Interconnexions Optiques et MEMS
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