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MEMSnet Home: MEMS-Talk: Re: Metal sticking well to silicon and silicon nitride
Re: Metal sticking well to silicon and silicon nitride
1996-07-03
Mac McReynolds
1996-07-03
[email protected]
1996-07-04
Nutt Wolfgang
1996-07-04
Pierre Jaccard
1996-07-05
Padmaja Ramadas
1996-07-09
Bahram Ghodsian
1996-07-10
Mac McReynolds
1996-07-17
[email protected]
Re: Metal sticking well to silicon and silicon nitride
Padmaja Ramadas
1996-07-05
Gold does not stick very well to sio2 or si3n4 surface a thin layer of
chromium is needed as an interface layer.  we e-beam about 1000A
of chromium before the gold is e-beam

good luck
padmaja


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