Try MVP here http://www.mvpprograms.com/

Vic

----- Original Message -----
From: Roger Brennan 
To: 
Sent: Monday, January 28, 2002 3:49 AM
Subject: [mems-talk] Statistical Process Control (SPC)


> Has anyone found a Statistical Process Control (SPC) book or software
program they like?
> I need to set up something for a small fab and track the usual things:
sheet rho, thicknesses, etch depths, critical dimensions, etc.
>
> Thanks very much,
>
> Roger Brennan
> Home:
> 1403 Forrestal Avenue
> San Jose, CA 95110
> (408)453-0711 (telephone)
> (408)573-9407 (fax)
> [email protected]
>
> Work:
> Endevco
> 355 N. Pastoria Ave.
> Sunnyvale, CA 94085
> 408-739-3533 ext 204
> [email protected]
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