Dear all,

Where can I find resources on thermal coefficient of expansions and Young's
modulus for thin films?  In particular, PE Oxide, SOG, BPSG, PE SiN, and
thermal oxide.  I have tried the MEMS Clearinghouse Material Database
already but that do not have many of the infomation I am interested.  I
really appreciate any help offered!

David Tang
Senior Product Engineer
MEMSIC Inc.
100 Burtt Road
Andover, MA 01810
Phone:  978-623-8188 x 237
www.memsic.com