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MEMSnet Home: MEMS-Talk: Photoresist absorption
Photoresist absorption
1996-07-05
David Wood
Photoresist absorption
David Wood
1996-07-05
We would like to know the best photoresist to use for maximum absorption at 543
nm (not a misprint!). Manufacturers data sheets show weak absorption at this
wavelength, but we would like more accurate numbers. Anyone recommend a good
broad band resist - preferably thin?

Cheers,

Dave Wood.


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