MEMS-talk

News	MEMSnet Home: MEMS-Talk: Need to remove a couple of thin layers from a GaAs wafer wet etchant of Silicon with etch rate in few nm/min 2002-01-23 Mohammed Javeed Shaikh wet etchant of Silicon with etch rate in few nm/min 2002-01-24 Bernard Legrand Need to remove a couple of thin layers from a GaAs wafer 2002-01-29 Xinbing Liu Need to remove a couple of thin layers from a GaAs wafer Xinbing Liu 2002-01-29 Hi. I have a 3" GaAs wafer with some layers grown on it. I need to remove the top two layers. The top layer is 50 nm thick GaAs, and the next layer is 15 nm thick In(0.22)Ga(0.78)As. The third layer is 15 nm thick GaAs layer. I need to remove the top two layers and stop at the 15 nm thick GaAs layer. Any ideas how to do it? Is there any vendors I can turn to? Thanks, Xinbing Liu reply
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