Hi MEMS researchers,
Does anybody know of the vendors who could provide thick film (or screen
printed) pzt bimorph (or unimorph) membranes that generate 10 microns
deflection within 500 um x 500 um area? The block force needed would be
around 0.01 N.
Thank you.
Best regards,
EH
-------------------------------------------------------
EH Yang, Ph.D
MEMS Technology Group, M/S 302-306
In Situ Technology and Experiments Systems Section (384)
NASA Jet Propulsion Laboratory
California Institute of Technology
4800 Oak Grove Drive, Pasadena, CA 91109-8099
Tel: 818-354-7059 Fax: 818-393-4540
Email: [email protected]
