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MEMSnet Home: MEMS-Talk: polyimide stripper?
polyimide stripper?
2002-01-31
apatel43
2002-01-31
Michael Martin
2002-01-31
Mac McReynolds
2002-01-31
Walter Stonas
2002-01-31
[email protected]
2002-01-31
BERAUER,FRANK (HP-Singapore,ex7)
2002-02-01
Rivas, Isabel
2002-02-01
Michael Martin
2002-02-04
Rivas, Isabel
2002-02-04
[email protected]
polyimide stripper?
Michael Martin
2002-01-31
You can always use an oxygen plasma

-Mike

>>> [email protected] 01/31/02 08:42AM >>>
Hi,

I was wondering if anyone knows of a photoresist stripper which would
take off
a polyimide layer?

Thanks,
Arti Patel

Arti Patel
Research Assistant/Graduate Student
University of Illinois at Chicago
Department of Bioengineering
851 S. Morgan St. (m/c 063)
Chicago, IL 60607
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