Hi Arti,

EKC Technologies and Ashland Chemical make a stripper for polyimide. The one
from EKC is good for polyimide baked up to 200 deg C.

Sincerely,
Walter Stonas
Process Development Engineer


-----Original Message-----
From: apatel43 [mailto:[email protected]]
Sent: Thursday, January 31, 2002 8:42 AM
To: [email protected]
Subject: [mems-talk] polyimide stripper?


Hi,

I was wondering if anyone knows of a photoresist stripper which would take off
a polyimide layer?

Thanks,
Arti Patel

Arti Patel
Research Assistant/Graduate Student
University of Illinois at Chicago
Department of Bioengineering
851 S. Morgan St. (m/c 063)
Chicago, IL 60607
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