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MEMSnet Home: MEMS-Talk: Burn boxes
Burn boxes
2002-01-30
Michael Martin
2002-01-31
Walter Stonas
2002-01-31
[email protected]
RF MEMS literature
2002-02-02
Krishna Kashyap
2002-02-04
Liz Shelley
Burn boxes
Walter Stonas
2002-01-31
Hi Mike,

Certain PECVD systems require a burn box and others require a scrubber and
burn box. This is very dependant on the gases you are trying to flow and the
local fire departments requirements as well as local air quality restrictions.
The type of gases and number of chambers you want to run to the same unit
dictate the type of unit.

Sincerely,
Walter Stonas

-----Original Message-----
From: Michael Martin [mailto:[email protected]]
Sent: Wednesday, January 30, 2002 4:20 PM
To: [email protected]
Subject: [mems-talk] Burn boxes


Can anyone recomend a good vendor for a Burn Box to be used on a PECVD
system? Have one to sell?

Thanks,
     Mike
     U of Louisville
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