If Oxygen is not enough, some Hydrogen radicals (add forming
gas or Ammonia) do wonders to remove stubborn organic layers.
Greetings,
Frank Berauer
Senior R&D Engineer
Hewlett-Packard Singapore
-----Original Message-----
From: Michael Martin [mailto:[email protected]]
Sent: 1 February 2002 01:08
To: [email protected]
Subject: Re: [mems-talk] polyimide stripper?
You can always use an oxygen plasma
-Mike
>>> [email protected] 01/31/02 08:42AM >>>
Hi,
I was wondering if anyone knows of a photoresist stripper which would
take off
a polyimide layer?
Thanks,
Arti Patel
Arti Patel
Research Assistant/Graduate Student
University of Illinois at Chicago
Department of Bioengineering
851 S. Morgan St. (m/c 063)
Chicago, IL 60607
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