Hello Sanghoon,

I am also very interested in this phenomenon, and would appreciate hearing from
you when you find further information on this topic. In the meantime, here are a
few references to get you started:


Wibbeler, J.; Pfeifer, G.; Hietschold, M.
"Parasitic charging of dielectric surfaces in capacitive microelectromechanical
systems (MEMS)"
Sensors and Actuators A (Physical)
v. A71,  p. 74, 1998

Chan, Garikipati, Dutton
"Characterization of Contact Electromechanics Through Capactitance-Voltage
Measurements and Simulations"
Journal of Microelectromechanical Systems
v. 8, no. 2, June 1999

Buchanan, Abram, Morant
"Charge Trapping in Silicon-Rich Si3N4 Thin Films"
Solid-State Electronics, v. 30, no. 12, p.1295-1301


Best wishes in all your research!

-Craig McGray
 Dartmouth College



[email protected] wrote:

> Message: 12
> From: "Sanghoon Lee" 
> To: 
> Date: Fri, 1 Feb 2002 13:18:12 -0700
> Subject: [mems-talk] Corona discharge in a micro gap
> Reply-To: [email protected]
>
> Deal all,
>
> I'm working on the feasibility study of corona discharge
> for micro actuators. However, I couldn't find papers talking
> about that phenomena in the micro domain.
> I need fundamental equations and experimental data for
> point-plane (sharp electrode - plane coated with insulator)
> corona system.
>
> AND.. Could anybody explain to me what is the different effect
> on the insulator between the field emission and the corona discharge?
> I think in both case ions (or electrodes) can stick to the insulator.
>
> Thank you.
>
> Best wishes,
>
> Sanghoon Lee