For processing microscope slides (25 mm x 75 mm glass) in piranha etc. we
use to use Entegris (Fluoroware) mask carriers.
Phil Klauder
215-646-7400 x2151
-----Original Message-----
From: Eric Lagally [mailto:[email protected]]
Sent: Monday, February 04, 2002 6:35 PM
To: [email protected]
Subject: [mems-talk] Rectangular wafer cassettes
Hi,
We will be starting a project using rectangular
glass slides (25 x 75 mm and 21 x 75 mm), and we are
in need of ways to hold these slides for etching and
cleaning processes (HF, Pirahna, etc.). Does anybody
know of a source for such things? I know Entegris
sells custom-sizable carriers, but they are designed
for transport, and the materials they are made from
(i.e., stainless steel) aren't good in etches. Any
help is appreciated.
Eric
=====
Eric Lagally
UCB/UCSF Joint Bioengineering Graduate Group
Mathies Research Laboratory
313 Lewis Hall
Berkeley, CA 94720
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