A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Fwd: [mems-talk] silicon nitride and MgF2 multilayer
Fwd: [mems-talk] silicon nitride and MgF2 multilayer
2002-02-05
Thomas B. Jones
Fwd: [mems-talk] silicon nitride and MgF2 multilayer
Thomas B. Jones
2002-02-05
Antireflective coatings work by providing destructive interference at
certain wavelengths.  To calculate the correct thickness, first identify the
wavelength (in air or vacuum) you wish to work with.   To achieve an
antireflective coating, you must "match" wave impedances.  The basic
requirements are:

1)  eta(coat) = sqrt [eta(sub)*eta(air)],
where eta = |E|/|H|(wave impedance), coat = coating, sub = substrate, air =
air (or vacuum, etc.)

2)  coating thickness = N*wavelength(coat) / 4,
where N =any odd integer

Multiple quarter-wave coatings will broaden the range of wavelengths with
good reflection prevention.

TBJ


> Dear friends
>     Can anybody give me the information regarding the
> thickness of SiNx and MgF2 thin layers for
> antireflective applications.
>      I will be very much thankful.
>
> Yours
>
> K.C.Mohite


________________________________________________
Thomas B. Jones
Professor of Electrical Engineering
University of Rochester
Rochester, NY   14627   (USA)
phone:  1-585-275-5233    NEW AREA CODE
fax:    1-585-273-4919    NEW AREA CODE
research website:            www.ece.rochester.edu/users/jones/
electrostatics demos: www.ece.rochester.edu/~jones/demos/
________________________________________________

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
Addison Engineering
The Branford Group
MEMS Technology Review