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MEMSnet Home: MEMS-Talk: Resistivity measurment.
Resistivity measurment.
2002-02-05
Sinu Mathew
2002-02-05
Roger Brennan
Resistivity measurment.
Sinu Mathew
2002-02-05
Hai ,
    I am doing the resistivity measurements of  Cu
films
deposited on Si substrate with native oxide by van der

Pauw  method.While calculating  Rho I have some
concussion regarding the thickness...Whether I have to
use the  wafer + film  thickness or only the film
thickness. Please gave some reference regarding this..
     Thanks in advance
                                    Sinu Mathew
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