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MEMSnet Home: MEMS-Talk: Dry release
Dry release
2002-02-05
Jamie Wang
2002-02-08
[email protected]
Dry release
Jamie Wang
2002-02-05
Anyone has experience with dry release of the
sacrifacial oxide? as opposed to HF wet release. Since
I'll have Al as metal layer, so I can't use HF.
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