Hi Peng,

Aren't the SU-8 components you're making fabricated on the silicon?? If so
then they will already be bonded - getting them off tends to be a bigger
problem :0)

Sorry if I'm missing the point here. If you're having problems with the
SU-8's adhesion on the silicon then you can buy adhesion promoters from
Microchem ( www.microchem.com )and others.

I don't know if this is of any help, but I hope it is - let me know if I've
misunderstood what you were asking.

Regards,

Kevin Banks

>From: "Peng Jin" 
>Reply-To: [email protected]
>To: 
>Subject: [mems-talk] SU-8 bonding
>Date: Tue, 5 Feb 2002 16:46:43 -0000
>
>Hello everyone,
>
>In my experiment, I need to bond the SU-8 parts with silicon or other
>material. Could anyone give me some idea about it?
>
>Thanks
>
> >=========================================
> >Dr. P. Jin
> >Research Associate
> >School of Manufacturing and Mechanical Engineering
> >The University of Birmingham
> >Edgbaston, Birmingham B15 2TT
> >Tel:  ++44-121-414-4256
> >=========================================
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