Hi Jim,

It seems the guys have got you pretty well covered for reading material, but
I thought I'd let you know about a book I recently got hold of and have
found very useful. It's very detailed but doesn't assume much prior
knowledge, so you can take things as far as you want depending on how much
you wish to know about specific things. It's called:

Garnder, Varadan and Awadelkarim
"Microsensors, MEMS, and Smart Devices"
Wiley, 2001
http://www.wiley.com

Hope this helps,

Regards,

Kevin Banks


>From: Craig McGray 
>Reply-To: [email protected]
>To: [email protected], [email protected]
>Subject: [mems-talk] MEMS Technology
>Date: Mon, 04 Feb 2002 00:25:44 -0500
>
>Hi Jim,
>
>Here are a few references to get you started:
>
>The first is a reference to the MEMS research going on at Sandia
>National Labs. In addition to being exciting and high-quality work, the
>research there has the advantage of being highly accessible to a lay
>audience -- they typically build mechanical devices at the micro-scale
>whose macro-scale equivalents are household items: gears, chains, pad
>locks, etc. You can find their work on-line at:
>
>http://mems.sandia.gov/scripts/index.asp
>
>The next two are texts that have a slightly technical bent, but are
>presented at the introductory level. Either of these could serve as a
>textbook for an undergraduate course in MEMS, and yet both are great
>references for researchers who are active in the field of MEMS. They
>are:
>
>Marc Madou
>"Fundamentals of Microfabrication"
>CRC Press, 1997
>http://www.biomems.net/
>
>Greg Kovacs
>"Micromachined Transducers Sourcebook"
>McGraw Hill, 1998
>
>The last is the Journal of Microelectromechanical Systems (JMEMS),
>published by IEEE. This is highly technical, but represents the state of
>the art in the field at any given time. You can find this journal
>on-line at:
>
>http://ieeexplore.ieee.org/lpdocs/epic03/RecentIssues.htm?punumber=84
>
>Best wishes in all your efforts!
>
>-Craig McGray
>  Dartmouth College
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