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MEMSnet Home: MEMS-Talk: SU-8 Resist Sensitivity
SU-8 Resist Sensitivity
2002-02-06
[email protected]
2002-02-07
shay kaplan
2002-02-08
Brubaker Chad
2002-02-11
Kevin Banks
SU-8 Resist Sensitivity
[email protected]
2002-02-06
Is anyone using SU-8 with broadband exposure tools (g and h line)?  I
understand that the resist is insensitive above 400nm.

Russell Cox
Process Engineer-Clare, Inc.
978-524-6846 Work Phone
978-479-2767 Cell Phone

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