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MEMSnet Home: MEMS-Talk: Leak test for vacuum package.
Leak test for vacuum package.
2002-02-06
li gang
2002-02-07
Paolo Bondavalli
Leak test for vacuum package.
li gang
2002-02-06
Dear all,

Could you please give me some advice or information about
leak test for vacuum package? As far as I know, there are
some standard for leak test including fine and gross test.
However, it is reported that the method is not very appropriate
for small cavity.

Any advice, information or reference are greatly appriciated.

Thanks in advance,

Li Gang

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