Hi Li,
Test for leak are:
fine leaks MIL STD 883 METHOD 1014
gross leaks MIL STD 883 METHOD 1014
Bye

li gang a icrit :

> Dear all,
>
> Could you please give me some advice or information about
> leak test for vacuum package? As far as I know, there are
> some standard for leak test including fine and gross test.
> However, it is reported that the method is not very appropriate
> for small cavity.
>
> Any advice, information or reference are greatly appriciated.
>
> Thanks in advance,
>
> Li Gang
>
> _________________________________________________________________
> Send and receive Hotmail on your mobile device: http://mobile.msn.com
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.mems-exchange.org/

--
*********************************************************
Dr. Paolo Bondavalli
R&D Engineer
LABCOM - Laboratoire Interconnexions Optiques et MEMS
THALES (ex THOMSON-CSF) CORPORATE RESEARCH CENTER
Domaine de Corbeville,
Route Departementale 128
F91404 ORSAY
(FRANCE)
Tel : 01 69 33 08 63
Fax : 01 69 33 08 62
Email : [email protected]
**********************************************************
Disclaimer: Opinions expressed herein are my own and may
  not represent those of my employer.
**********************************************************