We use shadow masks produced by Photo Etch Technologies at 978-805-5004.
We've found that using 0.005" thick Invar works well for us. We had
originally used Stainless Steel, but the sputtering process heated the
shadow mask and caused it to bow away from the substrate. That gave us a
blurred pattern.

Phil Klauder
215-646-7400  x2151



-----Original Message-----
From: Nirmal Govindaraju [mailto:[email protected]]
Sent: Wednesday, February 06, 2002 11:28 AM
To: [email protected]; [email protected]
Subject: [mems-talk] Shadow Masks


Hi,

I'm a Graduate Student at North Carolina State University and I am looking
for some information on people who produce shadow masks. Please note that
I will be using the shadow masks to fabricate thin film resistors and
thermocouples on a substrate using e-beam evaporation.

Thank you.
Sincerely,
Nirmal Govindaraju
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